Lead: With the rise of the automation transformation boom, the AGV+ manipulator combines the functions of both hands and feet, and the composite robot is increasingly sought after by various industries. From the perspective of industry demand, the demand for robots in electronic devices such as automobiles and semiconductors is increasing. Among them, composite robots have become more mature intelligent devices in the semiconductor industry.
Application requirements for robots in the semiconductor industry
The semiconductor industry includes many fields, and there are many complicated processes in these fields, such as the early crystal manufacturing, medium-term package integration, and later assembly and packaging, transportation and so on. It is both a challenge and a trend for robots to enter the semiconductor industry. The robot itself needs to be easy to use, flexible and lightweight, not only to meet the dust-free space requirements, but also to be cautious and fragile. It requires high precision for extremely small devices. Positioning, placement and assembly.
The semiconductor industry has strict requirements for industrial robots. In the vacuum environment, the cleanliness of the robots must be ensured. Because of the special nature of the semiconductor products, the robots are required to be shockproof, anti-jitter, and quietly produced, and can have a repeatability of up to 5 mm. Wait.
The application of compound robots in the semiconductor industry
As a new type of logistics equipment, the compound robot has high flexibility and adaptability. It combines key technologies such as intelligent drive navigation technology to realize automatic material handling and intelligent sorting. It has been widely used in the internationally renowned semiconductor industry and has achieved Better application results.
According to the statistics of China Mobile Robotics (AGV) Industry Alliance and New Strategic Robot Industry Research Institute, the application of composite robots of AGV and robots in the global semiconductor industry has reached about 5,000 units, Panasonic, Siemens, Fujitsu, and Xuxu Electronics. Semiconductor companies such as Huatong Technology and Jingyuan Optoelectronics have applied related AGV robots to production.
The AGV mobile robot application is the most common in the semiconductor industry. AGV transmission automation is also a component of the automation of the transmission system. It has become the largest single investment project in the modern semiconductor factory automation system.
The Mobile Handling Robot (AGV) provides logistics support for semiconductor products, enabling free movement in the shop floor, workshop and workshop. Logistics equipment automation usually involves other transfer-related actuators such as traditional assembly lines, auto-stereoscopic libraries, AGV trolleys, etc., including how to transport them to the process equipment side or between different storage areas, and the transfer of wafers inside the process equipment. (including material buffer, load port, wafer transfer robot, etc.).
Semiconductor processing environments require equipment that operates within them to have high cleanliness levels, anti-static, and high reliability. Therefore, the composite robot used in the IC environment must meet the above characteristics while meeting the basic handling requirements.
In the semiconductor production workshop, the wheels of the AGV mobile robot must conform to the standard, the regulation must be convenient, and it must also be trackless navigation. Such a series of high standards has discouraged many robot companies, but from another perspective, this shows that the semiconductor industry has a higher threshold, which also sets certain conditions for the entry of composite robot companies.
Xinsong vacuum robot and compound robot developed for the semiconductor industry
Clean (vacuum) robots and semiconductor equipment, as one of the core businesses of Xinsong, have formed a number of product lines for atmospheric manipulators, vacuum manipulators, EFEM, vacuum platforms, STOCKER and AMHS systems. Clean product customers are now available in mainland China and Taiwan.
At present, Xinsong clean robot has completely broken the monopoly of similar foreign companies in the semiconductor field, and has a domestic market share of more than 50%.
Xinsong compound robot is based on the innovative fusion of mobile robot and industrial robot system. It integrates technologies such as visual compensation, force control, collision protection and active navigation. It can quickly lay out the automation factory and adapt to the highly flexible production mode. It is mainly used in semiconductor package testing. The link can meet the automatic transportation between FOUP, CST and MGZ in each machine. The terminal positioning accuracy can reach ±0.05mm and CLASS 100 cleanliness, which can provide the optimal system solution for semiconductor production applications.
